JPH0327536U - - Google Patents

Info

Publication number
JPH0327536U
JPH0327536U JP8570589U JP8570589U JPH0327536U JP H0327536 U JPH0327536 U JP H0327536U JP 8570589 U JP8570589 U JP 8570589U JP 8570589 U JP8570589 U JP 8570589U JP H0327536 U JPH0327536 U JP H0327536U
Authority
JP
Japan
Prior art keywords
air
space
clean room
conditioned
conditioned space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8570589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8570589U priority Critical patent/JPH0327536U/ja
Publication of JPH0327536U publication Critical patent/JPH0327536U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP8570589U 1989-07-24 1989-07-24 Pending JPH0327536U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8570589U JPH0327536U (en]) 1989-07-24 1989-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8570589U JPH0327536U (en]) 1989-07-24 1989-07-24

Publications (1)

Publication Number Publication Date
JPH0327536U true JPH0327536U (en]) 1991-03-19

Family

ID=31634971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8570589U Pending JPH0327536U (en]) 1989-07-24 1989-07-24

Country Status (1)

Country Link
JP (1) JPH0327536U (en])

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069441A (ja) * 1983-09-26 1985-04-20 Ryowa Chiyouon Kogyo Kk ス−パ−クリ−ンシステム
JPS6176837A (ja) * 1984-09-22 1986-04-19 Shinko Kogyo Kk 清浄作業室
JPS629135A (ja) * 1986-03-19 1987-01-17 Hitachi Ltd 空気調和装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069441A (ja) * 1983-09-26 1985-04-20 Ryowa Chiyouon Kogyo Kk ス−パ−クリ−ンシステム
JPS6176837A (ja) * 1984-09-22 1986-04-19 Shinko Kogyo Kk 清浄作業室
JPS629135A (ja) * 1986-03-19 1987-01-17 Hitachi Ltd 空気調和装置

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